A new kind of eddy current sensor, which could be used in sensing surface topography of metal materials and recognizing the cracks on the surface of metal materials with high spatial resolution is devised and introduced here. Finite element analysis is applied in analyzing and demonstrating the high spatial resolution sensing abilities of the proposed sensor. Moreover,the characters of the proposed sensor are also demonstrated by experiments. The experiments demonstrated that the proposed sensor has higher spatial sensing resolution in recognizing the surface topography of cracks of the metal materials by comparing with the traditional eddy current sensor. At last, scanning ? Data obtained when sensor scans through the detected metal plate are translated into a graph by applying 3D visualization technology. In this way, both the change of surface topography and locations of cracks on the surface of the metal materials are displayed intuitively and clearly.%针对金属材料表面形貌检测问题,论文设计制作了一种高空间分辨力的电涡流传感器,可实现金属管道内壁复杂表面形貌及裂纹的高分辨检测.论文采用ANSYS有限元分析软件对传感器进行了仿真分析,验证了传感器对金属材料表面形貌变化的高空间分辨检测能力.论文同时对该种传感器性能进行了实验测试.实验结果表明,相比传统的电涡流传感器,本文设计的传感器对裂纹、对金属材料表面形貌变化具有更高的检测分辨力.最后,论文采用三维可视化技术,将传感器对金属板表面形貌的扫描检测数据转化成三维图像,可直观地显示出被测金属板表面形貌变化及裂纹位置.
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