Aiming at the problem that it is difficult to grasp the relationships of the structure and performance in the design process of multi-axis piezoelectricity force sensor, an optimization design method based on the ANSYS is proposed. The four-axis force sensor is constituted according to a specific layout with different cutting-type quartz. The influence of the elastic film on the performance of the sensor has researched by using the ANSYS. The analysis show that it can effectively adjust the sensitivity and natural frequency, and improve the sensor design precision.%在压电式多维力传感器设计过程中,传感器结构对性能的影响难以准确把握,提出一种基于ANSYS的传感器优化设计方法.把不同切型的石英晶片按照特定的双环结构排列实现空间四维力的测量.运用ANSYS有限元软件,研究压电式四维力传感器弹性膜对传感器灵敏度与固有频率的影响规律.分析结果表明:该方法能够有效的平衡传感器灵敏度与固有频率的相互制约,提高传感器的设计精度.
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