通过在不同测试环境对高量程加速度传感器进行测试,并对传感器在测试中出现的失效进行分析,在实验室环境测试中出现的主要失效模式为键合引线的脱落和微梁的断裂,其原因是不同金属的引线键合强度较低；重复性的冲击加速了材料的疲劳.在实弹测试环境测试中出现的传感器失效原因主要足在侵彻测试中传感器芯片与侵彻信号中高频分量发生共振导致过载增大,传感器芯片上的微结构位移失控,造成传感器结构断裂.%The high-g acceleration sensor is tested in different environment, and failures in the tests are also analyzed. In the lab environment,the main failure modes of the micro accelerometer under shocking are fracture of the cantilever and the wire bund shearing. The reason is that the slrength of wire bonding between different metals is too weak;and repetitive impact accelerates the material fatigue. In actual environment testing,the failure is mainly due to the resonance between the sensor chip and high frequency signal in the penetration lesting process, which enlarges the overload and results in the sensor broken for the micro-structure displacement out of control.
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