利用微电子机械加工技术成功地研制出电势激励、压阻拾振的高精度硅谐振梁式压力传感器．传感器的谐振器的品质因素Q值大于17 000．采用扫描检测方式和闭环自激振荡方式测定压力传感器的压力特性，其压力测试范围为0～400kPa，线性相关系数为0．999％，测试精度小于0．06％F．S．%A high accuracy pressure sensor with a micro-machined single crystal beam resonator has been successfully fabricated by utilizing micro-electromechanical system (MEMS)technology. The silicon beam is electro-thermally excited into vibration and the resulting mechanical vibration of the beam is detected by a piezo resistor receptor. The quality factor Q value of this silicon beam resonator is greated than 17 000 in vacuum. The silicon resonant beam pressure sensor has been characterized with an open-loop frequency sweeping method and a close-loop self-oscillating method. The sensor shows a good linearity of frequency versus pressure in the range from 0 to 400 kPa, and a high accuracy of 0.06％ F. S.
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