Engineering Research Center for Semiconductor Integrated Technology;
Institute of Semiconductors;
Chinese Academy of Sciences;
Beijing 100083;
China;
The State Key Laboratory for Superlattices and Microstructures;
Institute of Semiconductors;
Chinese Academy of Sciences;
Beijing 100083;
China;
Key Laboratory of Semiconductor Materials Science;
Institute of Semiconductors;
Chinese Academy of Sciences;
Beijing 100083;
China;