Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source

Lan Chao-Hui; Lan Chao-Zhen; Hu Xi-Wei; Chen Zhao-Quan; Liu Ming-Hai

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Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source

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A self-consistent and three-dimensional (3D) model of argon discharge in a large-scale rectangular surface-wave plasma (SWP) source is presented in this paper, which is based on the finite-difference time-domain (FDTD) approximation to Maxwell's equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200 W and a filling gas pressure of 50 Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3 cm from the quartz window.

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《中国物理：英文版》 |2009年第6期|2412-2419|共8页
作者
Lan Chao-Hui; Lan Chao-Zhen; Hu Xi-Wei; Chen Zhao-Quan; Liu Ming-Hai;
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作者单位

College of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;

Institute of Surveying & Mapping, Information Engineering University, Zhengzhou 450052, China;

College of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;

College of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;

College of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;

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正文语种 chi
中图分类物理学;
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Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source

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