The reliability of measurements on electron energy distribution function in silane rf glow discharges

林揆训; 林璇英; 池凌飞; 余楚迎; 姚若河; 余云鹏

首页> 中文期刊> 《中国物理：英文版》 >The reliability of measurements on electron energy distribution function in silane rf glow discharges

The reliability of measurements on electron energy distribution function in silane rf glow discharges

开具论文收录证明 >>

期刊封面封底目录下载 >>

文献代查 >>

页面导航

摘要
著录项
相关主题

摘要

Electron energy distribution function (EEDF) is a key parameter of plasmas, which is directly proportional to the second derivative of the probe I-V characteristics. Because of an amplifying effect of unavoidable noises in the experimental prolbe I-V curves during the derivation process, the experimental I-V curves should be smoothed before performing the numerical derivation. This paper investigates the effect of adjustable factors used in the smoothing process on the deduced second derivative of the I-V curves, and an optimum group of the adjustable factors is selected to make the rms deviation of the smoothed I-V curves from the measured curves less than 1%. A simple differentiation circuit is designed and used to measure the EEDF parameter straightforwardly. It is the first time, so far as we know,to measure the EEDF parameters simultaneously by means of both numerical and circuit derivative methods under the same discharge conditions and on the same discharge equipment. The deviation between two groups of mean electron energy E and electron density ne obtained by the above different methods is within about 7%. This apparently improves the reliability of the measurements of the EEDF parameters.

著录项

来源
《中国物理：英文版》 |2003年第2期|198-203|共6页
作者
林揆训; 林璇英; 池凌飞; 余楚迎; 姚若河; 余云鹏;
展开▼
作者单位

Department of Physics, Shantou University, Shantou 515063, China;

Department of Physics, Shantou University, Shantou 515063, China;

Department of Physics, Shantou University, Shantou 515063, China;

Department of Physics, Shantou University, Shantou 515063, China;

Department of Physics, Shantou University, Shantou 515063, China;

Department of Physics, Shantou University, Shantou 515063, China;

展开▼
原文格式 PDF
正文语种 chi
中图分类
关键词
Langmuir probe; reliability; numerical derivation; circuit derivation;

机译：Langmuir探针可靠性数值推导电路推导;

The reliability of measurements on electron energy distribution function in silane rf glow discharges

摘要

著录项

相关主题

期刊订阅