Dynamics of Collisional Sheaths for Spherical and Cylindrical Geometries

WANG Dezhen; MA Tengcai

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Dynamics of Collisional Sheaths for Spherical and Cylindrical Geometries

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摘要

A model for the source-free,collisional,cathodic plasma sheath in both spherical and cylindrical geometries is developed.The analytic expressions for the sheath scaling law,electric potential profile,ion density and average ion velocity spatial variation in the sheath are derived.

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《中国物理快报：英文版》 |1994年第12期|744-746|共3页
作者
WANG Dezhen; MA Tengcai;
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作者单位

Department of Physics;

Dalian University of Technology;

Dalian 116024;

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原文格式 PDF
正文语种 chi
中图分类等离子体物理学;
关键词
cylindrical; cathodic; scaling;

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1. Model of Collisional Sheath in Spherical and Cylindrical Geometries for Plasma Source Ion Implantation [J] . WANG De-zhen ,YU Jiong ,GONG Ye . 中国物理快报：英文版 . 1996,第2期
2. Two-Dimensional Fluid Simulation of Collisional Plasma Sheath over rf Powered Electrode with Cylindrical Hole [J] . 侯璐景 ,王友年 ,Z.L.Miskvic . 等离子体科学和技术：英文版 . 2004,第4期
3. Pulsed Ion Sheath Dynamics in a Cylindrical Bore for Inner Surface Grid—Enhanced Plasma Source Ion Implantation [J] . 王久丽 ,杨思泽 ,等 . 中国物理快报：英文版 . 2002,第10期
4. Sheath Criterion for a Collisional Electronegative Plasma Sheath in an Applied Magnetic Field [J] . 邹秀 ,刘惠平 ,邱明辉 . 中国物理快报：英文版 . 2011,第12期
5. DYNAMIC ANALYSIS FOR SHALLOW ELASTIC CYLINDRICAL INCLUSION NEAR MUL TIPLE SEMI-CYLINDRICAL HILLS IMPACTED BY SH-WAVE [C] . Xiao-tang L(U) ,Zai-lin YANG ,Dian-kui LIU . 第三届全国压电和声波理论及器件技术研讨会 . 2008
6. Collision and Destruction:An Analysis of Tennessee Wiliams's Caton a Hot Tin Roof from Hegel's Collision Theory [A] . 马忆莞 . 2012

Dynamics of Collisional Sheaths for Spherical and Cylindrical Geometries

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