Compositional and Structural Properties of TiO2-xNx Thin Films Deposited by Radio-Frequency Magnetron Sputtering

著录项

• 来源
  《中国物理快报：英文版》 |2006年第3期|682-685|共4页
• 作者

  景士伟; 刘益春; 梁宇; 马健钢; 吕有明; 申德振; 张吉英; 范希武; 穆日祥;

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• 作者单位

  Key Laboratory of Excited State Processes;

  Chinese Academy of Sciences;

  Changchun Institute of Optics;

  Fine Mechanics and Physics;

  Chinese Academy of Sciences;

  Changchun 130033;

  Center for Advanced Opto-electronic Functional Material Research;

  Northeast Normal University;

  Changchun 130024;

  Nanoscale Materials and Sensors Center for Photonic Materials and Devices;

  Fisk University;

  Nashville;

  TN 37208;

  USA;

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• 原文格式 PDF
• 正文语种 chi
• 中图分类 薄膜物理学;半导体技术;
• 关键词

  结构特性; TiO2-xNx薄膜; 射电频率磁电管; 石英衬底;