Chemisorption-Induced Resonance Frequency Shift of a Microcantilever

张吉桥; 冯西桥; 黄干云; 余寿文

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Chemisorption-Induced Resonance Frequency Shift of a Microcantilever

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The autonomy and property of atoms/molecules adsorbed on the surface of a microcantilever can be probed by measuring its resonance frequency shift due to adsorption.The resonance frequency change of a cantilever induced by chemisorption is theoretically studied. Oxygen chemisorbed on the Si(100) surface is taken as a representative example.We demonstrate that the resonant response of the cantilever is mainly determined by the chemisorption-induced bending stiffness variation,which depends on the bond configurations formed by the adsorbed atoms and substrate atoms.This study is helpful for optimal design of microcantilever-based sensors for various applications.

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《中国物理快报：英文版》 |2012年第5期|193-196|共4页
作者
张吉桥; 冯西桥; 黄干云; 余寿文;
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作者单位

Faculty of Civil and Transportation Engineering;

Guangdong University of Technology;

Guangzhou 510006;

AML;

Department of Engineering Mechanics;

Tsinghua University;

Beijing 100084;

Department of Mechanics;

School of Mechanical Engineering;

Tianjin University;

Tianjin 300072;

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原文格式 PDF
正文语种 chi
中图分类物理化学（理论化学）、化学物理学;
关键词
cantilever; adsorbed; sorption;

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Chemisorption-Induced Resonance Frequency Shift of a Microcantilever

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