Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film

著录项

• 来源
  《中国物理快报：英文版》 |2008年第11期|4128-4130|共3页
• 作者

  刘红梅; 赵全亮; 曹茂盛; 袁杰; 段中夏; 邱成军;

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• 作者单位

  School of Materials Science and Chemistry;

  Harbin Engineering University;

  Harbin 150001;

  School of Materials Science and Engineering;

  Beijing Institute of Technology;

  Beijing 100081;

  Key Laboratory of Integrated Circuit;

  Heilongjiang University;

  Harbin 150080;

  School of Information Engineering;

  Central University for Nationalities;

  Beijing 100081;

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• 原文格式 PDF
• 正文语种 chi
• 中图分类 薄膜物理学;
• 关键词

  微悬臂; 压电; PZT; 薄膜;