@@ We investigate the effect of silicone oil viscosity on the aggregation behavior of C:F clusters deposited on silicone oil liquid substrates with viscous coefficients of 100, 350 and 500mm2/s by C4Fs dual-frequency capacitively coupled plasma.The aggregated C:F chusters all exhibit a branch-like fractal structure.However, the fractal dimension decreases from 1.67 to 1.45 with the silicone oil viscous coefficient increasing from 100 mm2/s to 500mm2/s.Owing to the fractal dimension of 1.67 and 1.45, corresponding to the diffusion-limited-aggregation (DLA)model and the cluster-cluster-aggregation(CCA)model respectively, the results show that the increase of silicone oil viscosity can lead to the change of C:F clusters aggregating on a silicone oil liquid substrate from DLA to CCA growth.
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