Epitaxy of an Al-Droplet-Free AlN Layer with Step-Flow Features by Molecular Beam Epitaxy

PAN Jian-Hai; WANG Xin-Qiang; CHEN Guang; LIU Shi-Tao; FENG Li; XU Fu-Jun; TANG Ning; SHEN Bo

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Epitaxy of an Al-Droplet-Free AlN Layer with Step-Flow Features by Molecular Beam Epitaxy

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@@ We investigate epitaxy of AlN layers on sapphire substrates by molecular beam epitaxy.It is found that an atomically fiat surface can be obtained under Al-rich conditions at growth temperature of 780℃.However, the growth window to obtain an Al-droplet-free surface is too narrow to be well-controlled.However, the growth window can be greatly broadened by increasing the growth temperature up to 950℃, where an Al-droplet-free surface with a step-flow feature is obtained due to the enhanced re-evaporization rate and migration ability of Al adatoms.The samples grown at the higher temperature also show a higher crystalline quality than those grown at lower temperatures.

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《中国物理快报：英文版》 |2011年第6期|318-321|共4页
作者
PAN Jian-Hai; WANG Xin-Qiang; CHEN Guang; LIU Shi-Tao; FENG Li; XU Fu-Jun; TANG Ning; SHEN Bo;
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State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871;

State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871;

State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871;

State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871;

State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871;

State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871;

State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871;

State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871;

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Epitaxy of an Al-Droplet-Free AlN Layer with Step-Flow Features by Molecular Beam Epitaxy

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