Shock-Assisted Superficial Hexagonal-to-Cubic Phase Transition in GaN/Sapphire Interface Induced by Using Ultra-violet Laser Lift-Off Techniques

CHEN Wei-Hua; XU Ke; ZHANG Guo-Yi; HU Xiao-Dong; SHAN Xu-Dong; KANG Xiang-Ning; ZHOU Xu-Rong; ZHANG Xiao-Min; YU Tong-Jun; YANG Zhi-Jian; YOU Li-Ping

首页> 中文期刊> 《中国物理快报：英文版》 >Shock-Assisted Superficial Hexagonal-to-Cubic Phase Transition in GaN/Sapphire Interface Induced by Using Ultra-violet Laser Lift-Off Techniques

Shock-Assisted Superficial Hexagonal-to-Cubic Phase Transition in GaN/Sapphire Interface Induced by Using Ultra-violet Laser Lift-Off Techniques

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Ultra-violet (KrF excimer laser, λ =248 nm) laser lift-off (LLO) techniques have been operated to the GaN/sapphire structure to separate GaN from the sapphire substrate. Hexagonal to cubic phase transformation induced by the ultra-violet laser lift-off (UV-LLO) has been characterized by micro-Raman spectroscopy, micro-photoluminescence, along with high-resolution transmission electron microscopy (HRTEM). HRTEM indicates that UV-LLO induced phase transition takes place above the LLO interface, without phase transition under the LLO interface. The formed cubic GaN often exists as nanocrystal grains attaching on the bulk hexagonal GaN. The half-loop-cluster-like UV-LLO interface indicates that the LLO-induced shock waves has generated and played an assistant role in the decomposition of the hexagonal GaN and in the formation of cubic GaN grains at the LLO surface.

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《中国物理快报：英文版》 |2009年第1期|212-215|共4页
作者
CHEN Wei-Hua; XU Ke; ZHANG Guo-Yi; HU Xiao-Dong; SHAN Xu-Dong; KANG Xiang-Ning; ZHOU Xu-Rong; ZHANG Xiao-Min; YU Tong-Jun; YANG Zhi-Jian; YOU Li-Ping;
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State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

Electron Microscopy Laboratory, School of Physics, Peking University, Beijing 100871;

State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

Electron Microscopy Laboratory, School of Physics, Peking University, Beijing 100871;

State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

State Key Laboratory for Mesoscopic Physics and Department of Physics, School of Physics, Peking University,Beijing 100871;

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中图分类物理学;
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Shock-Assisted Superficial Hexagonal-to-Cubic Phase Transition in GaN/Sapphire Interface Induced by Using Ultra-violet Laser Lift-Off Techniques

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