Preparation and Characterization of Transparent Conductive Nb-Doped ZnO Films by Radio-Frequency Sputtering

CAO Feng; WANG Yi-Ding; LIU Da-Li; YIN Jing-Zhi; GUO Bao-Jia; LI Lei; AN Yu-Peng

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Preparation and Characterization of Transparent Conductive Nb-Doped ZnO Films by Radio-Frequency Sputtering

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Niobium-doped ZnO (NZO) transparent conductive films are deposited on glass substrates by rf sputtering at 300℃.Effects of sputtering power on the structural,morphologic,electrical,and optical properties of NZO films are investigated by x-ray diffraction (XRD),field emission scanning electron microscopy (FESEM),Hall measurement,and optical transmission spectroscopy. The obtained films are polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction.The minimum resistivity of 4.0×10-4 Ω cm is obtained from the film grown at the sputtering power of 170W.The average optical transmittance of the films is over 90%.

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《中国物理快报：英文版》 |2009年第3期|124-126|共3页
作者
CAO Feng; WANG Yi-Ding; LIU Da-Li; YIN Jing-Zhi; GUO Bao-Jia; LI Lei; AN Yu-Peng;
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State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012;

State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012;

State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012;

State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012;

State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012;

State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012;

State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012;

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中图分类物理学;
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Preparation and Characterization of Transparent Conductive Nb-Doped ZnO Films by Radio-Frequency Sputtering

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