Effect of Annealing Conditions on Properties of Sol-Gel Derived Al-Doped ZnO Thin Films

GAO Mei-Zhen; ZHANG Feng; LIU Jing; SUN Hui-Na

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Effect of Annealing Conditions on Properties of Sol-Gel Derived Al-Doped ZnO Thin Films

机译：退火条件对溶胶凝胶衍生铝掺杂ZnO薄膜性能的影响

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Transparent conductive Al-doped ZnO (AZO) thin films are prepared on normal glass substrates by the sol-gel spin coating method.The effects of drying conditions,annealing temperature and cooling rate on the structural,electrical and optical properties of AZO films are investigated by x-ray diffraction,scanning electron microscopy,the four-point probe method and UV- VIS spectrophotometry,respectively.The deposited films show a hexagonal wurtzite structure and high preferential c-axis orientation.As the drying temperature increases from 100℃ to 300℃ the resistivity of AZO films decreases dramatically.In contrast to the annealed films cooled in a furnace and in air,the resistivity of the annealed film which is cooled at -15℃ is greatly reduced.Increasing the cooling rate dramatically increases the electrical conductivity of AZO films.

机译：采用溶胶-凝胶旋涂法在普通玻璃基板上制备了透明的铝掺杂ZnO（AZO）导电薄膜。研究了干燥条件，退火温度和冷却速率对AZO薄膜结构，电学和光学性能的影响。分别通过X射线衍射，扫描电子显微镜，四点探针法和UV-VIS分光光度法测定。沉积膜呈六方纤锌矿结构并具有较高的c轴取向。随着干燥温度从100℃升高至300℃ AZO薄膜的电阻率急剧下降。与在炉中和空气中冷却的退火膜相比，在-15℃冷却的退火膜的电阻率大大降低。增加冷却速率会大大提高AZO膜的电导率。 AZO膜。

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《中国物理快报：英文版》 |2009年第8期|364-367|共4页
作者
GAO Mei-Zhen; ZHANG Feng; LIU Jing; SUN Hui-Na;
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Key Laboratory for Magnetism and Magnetic Materials of MOE,Lanzhou University,Lanzhou 730000;

Key Laboratory for Magnetism and Magnetic Materials of MOE,Lanzhou University,Lanzhou 730000;

Key Laboratory for Magnetism and Magnetic Materials of MOE,Lanzhou University,Lanzhou 730000;

Key Laboratory for Magnetism and Magnetic Materials of MOE,Lanzhou University,Lanzhou 730000;

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收录信息中国科学引文数据库(CSCD);中国科技论文与引文数据库(CSTPCD);
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正文语种 chi
中图分类物理学;
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Effect of Annealing Conditions on Properties of Sol-Gel Derived Al-Doped ZnO Thin Films

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