Light Irradiation through Small Particles and Its Applications for Surface Nanostructuring in Near Field

ZHOU Yi; HONG Ming-Hui; FUH Ying-Hsi Jerry; LU Li; TAN Leng Seow; Luk(y)anchuk B S

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Light Irradiation through Small Particles and Its Applications for Surface Nanostructuring in Near Field

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We investigate the light scattering through small particles and its applications in nanostructuring, such as nanobumping, nanopatterning and dry laser cleaning. The theoretical calculation based on Mie theory provides an exact solution for sphere cavity resonance and plasmon resonance, which are two mechanisms for dielectric and metallic particles assisted surface nanostructuring in near field. The experimental results indicate that nanobumps on glass surface and subwavelength holes array on silicon surface can be formed without cracks with the self-assembly of 1 μm silica particle mask under laser irradiation. It is also found that the scattering wave by 40 nm gold particles can propagate 200 times away in terms of particle radius as recorded by photoresist under the UV light irradiation. Meanwhile, dry laser cleaning of 40 nm gold particle on silicon wafer is demonstrated at plasmonic resonance frequency. The total cleaning efficiency is estimated to be 80%.

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《中国物理快报：英文版》 |2007年第10期|2947-2950|共4页
作者
ZHOU Yi; HONG Ming-Hui; FUH Ying-Hsi Jerry; LU Li; TAN Leng Seow; Luk(y)anchuk B S;
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作者单位

Department of Mechanical Engineering, National University of Singapore, Singapore 117576;

Data Storage Institute, Agency for Science, Technology and Research, Singapore 117608;

Data Storage Institute, Agency for Science, Technology and Research, Singapore 117608;

Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576;

Department of Mechanical Engineering, National University of Singapore, Singapore 117576;

Department of Mechanical Engineering, National University of Singapore, Singapore 117576;

Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576;

Data Storage Institute, Agency for Science, Technology and Research, Singapore 117608;

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正文语种 chi
中图分类物理学;
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Light Irradiation through Small Particles and Its Applications for Surface Nanostructuring in Near Field

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