Nanomorph Silicon Thin Films Prepared by Using an HW-MWECR CVD System

著录项

• 来源
  《中国物理快报：英文版》 |2005年第5期|1260-1263|共4页
• 作者

  HU Yue-Hui; MA Zhan-Jie; ZHOU Huai-En; ZHU Xiu-Hong; CHEN Guang-Hua; ZHOU Jian-Er; RONG Yan-Dong; LI Ying; SONG Xue-Mei; ZHANG Wen-Li; DING Yi; GAO Zhuo;

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• 作者单位

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Institute of Jingdezhen Ceramic, Jingdezhen 333001;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Institute of Jingdezhen Ceramic, Jingdezhen 333001;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

  Department of Materials Science and Engineering, Beijing University of Technology, Beijing 100022;

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• 原文格式 PDF
• 正文语种 chi
• 中图分类 物理学;
• 关键词