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首页> 中文期刊> 《中国物理快报：英文版》 >Properties of Diamond Film/Alumina Composites for Integrated Circuits with Ultra-High Speed and High Power

Properties of Diamond Film/Alumina Composites for Integrated Circuits with Ultra-High Speed and High Power

         
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摘要

@@ We report the properties of the diamond film/alumina composites which were thought of as promising substrate materials for integrated circuits with ultra-high speed and high power. The measurement results of dielectric properties of diamond film/alumina composites show that the coating of CVD diamond films could effectively reduce the dielectric constant of the composite. Carbon ion implantation into alumina substrates prior to the diamond deposition can reduce the dielectric loss of the composite from 5 × 10-3 to 2 × 10-3, and can give the composite better frequency stability. The thermal conductivity of composites could be obviously increased by coating CVD diamond film. The composite has a dielectric constant of 6.5 and a thermal conductivity of 3.98 W/(cmK) when the thickness of diamond film is up to 100 μm.

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  • 来源
    《中国物理快报：英文版》 |2004年第6期|1161-1163|共3页
  • 作者

    WANG Lin-Jun; XIA Yi-Ben; FANG Zhi-Jun; ZHANG Ming-Long; SHEN Hu-Jiang;

  • 作者单位

    School of Materials Science and Engineering, Shanghai University, Shanghai 201800;

    School of Materials Science and Engineering, Shanghai University, Shanghai 201800;

    School of Materials Science and Engineering, Shanghai University, Shanghai 201800;

    School of Materials Science and Engineering, Shanghai University, Shanghai 201800;

    School of Materials Science and Engineering, Shanghai University, Shanghai 201800;

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