Properties of Diamond-Like Carbon Films Synthesized by Dual-Target Unbalanced Magnetron Sputtering

LIU Cui; LI Guo-Qing; GOU Wei; MU Zong-Xin; ZHANG Cheng-Wu

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Properties of Diamond-Like Carbon Films Synthesized by Dual-Target Unbalanced Magnetron Sputtering

机译：双靶不平衡磁控溅射合成类金刚石薄膜的性能

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@@ Smooth, dense and uniform diamond-like carbon films (DLC films) for industrial applications have successfully been prepared by dual-target unbalanced magnetron sputtering and the DLC characteristics of the films are confirmed by Raman spectra. It is found that the sputtering current of target plays an important role in the DLC film deposition. Deposition rate of 3.5μm/h is obtained by using the sputtering current of 30 A. The friction coefficient of the films is 0.2-0.225 measured by using a pin-on-disc microtribometer. The structure of the films tends to have a growth of sp3 bonds content at high sputtering current. The compressive residual stress in the films increases with the increasing sputtering current of the target.

机译：通过双靶不平衡磁控溅射已经成功地制备了用于工业应用的光滑，致密且均匀的类金刚石碳膜（DLC膜），并且通过拉曼光谱证实了膜的DLC特性。发现靶的溅射电流在DLC膜沉积中起重要作用。通过使用30 A的溅射电流可获得3.5μm/ h的沉积速率。通过使用针盘式微摩擦计测得的膜的摩擦系数为0.2-0.225。在高溅射电流下，膜的结构倾向于sp3键含量的增长。薄膜中的压缩残余应力随着靶材溅射电流的增加而增加。

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《中国物理快报：英文版》 |2004年第11期|2249-2251|共3页
作者
LIU Cui; LI Guo-Qing; GOU Wei; MU Zong-Xin; ZHANG Cheng-Wu;
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State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116024;

State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116024;

State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116024;

State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116024;

State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116024;

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Properties of Diamond-Like Carbon Films Synthesized by Dual-Target Unbalanced Magnetron Sputtering

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