Analysing Imaging Signals of Negative-Charging Contrast in Scanning Electron Microscopy

ZHANG Hai-Bo(张海波); FENG Ren-Jian(冯仁剑); Katsumi URA

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Analysing Imaging Signals of Negative-Charging Contrast in Scanning Electron Microscopy

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Negative charging of a specimen may produce the image contrast of yielding the information under the insulating thin film in scanning electron microscopy.To clarify and make good use of the recently developed negative-charging contrast(NCC),we propose a simplified procedure for quantifying secondary electron(SE)imaging signals and report the calculated results.The theoretical considerations and calculations are validated by comparing the calculated relation between the SE signal and the surface potential with measured dynamic characteristics of the NCC images.The results show that in the region of weak negative charging the NCC formation is due to the SE redistribution.The intensity of SE signals decreases with increasing the amount of the SEs returning to the negatively charged surface whose local electric field may attract electrons.This results in the NCC transient characteristics.

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《中国物理快报：英文版》 |2003年第11期|2011-2014|共4页
作者
ZHANG Hai-Bo(张海波); FENG Ren-Jian(冯仁剑); Katsumi URA;
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作者单位

Department of Electronic Science and Technology,Xi'an Jiaotong University,Xi'an 710049;

Department of Electronic Science and Technology,Xi'an Jiaotong University,Xi'an 710049;

Professor Emeritus of Osaka University,Takakura-cho 1-14-9,Miyakojima-ku,Osaka 534-0011,Japan;

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Analysing Imaging Signals of Negative-Charging Contrast in Scanning Electron Microscopy

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