Influence of Combination of Casimir Force and Residual Stress on the Behaviour of Micro- and Nano-Electromechanical Systems

郑茂盛; 周根树; 赵文轸; 顾海澄

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Influence of Combination of Casimir Force and Residual Stress on the Behaviour of Micro- and Nano-Electromechanical Systems

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Casimir force and residual stresses actually appear in over-layers or films simultaneously. The study of the behaviour of micro- and nano-electromechanical systems in the presence of Casimir force and residual stress is of significance to the design of the relevant devices. We derive analytical expressions of the deflection of a bridge-shaped device under the mutual actions of Casimir force and residual stress in films. It is shown that the tensile residual stress enhances wavy behaviour of the deflection, while the compressive residual stress increases the deflection value and reduces the wavy behaviour.

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《中国物理快报：英文版》 |2002年第6期|832-834|共3页
作者
郑茂盛; 周根树; 赵文轸; 顾海澄;
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作者单位

State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049;

State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049;

State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049;

State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049;

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中图分类物理学;
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Influence of Combination of Casimir Force and Residual Stress on the Behaviour of Micro- and Nano-Electromechanical Systems

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