Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

YAO Dong-Sheng; LIU Jing-Ru; WANG Li-Ge; YU Chang-Xuan; ZHAN Ru-Juan

首页> 中文期刊> 《中国物理快报：英文版》 >Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相关主题

摘要

Hydrogen-free diamond-like carbon (DLC) films with the optical band gaps of 2.0-2.7 e V and the microhardness rnof 40-55 GPa are deposited by femtosecond KrF laser pulses. The film microstructure of nanometer spheroid is rnobserved. The filrn microhardness is improved with the increase of ion kinetic energy of plasma plume from 300rnto 600 eV. The characteristics of DLC film deposition with fs pulses is discussed.

著录项

来源
《中国物理快报：英文版》 |2000年第7期|540-541|共2页
作者
YAO Dong-Sheng; LIU Jing-Ru; WANG Li-Ge; YU Chang-Xuan; ZHAN Ru-Juan;
展开▼
作者单位

Department of Modern Physics, University of Science and Technology of China, HeFei 230026;

Third Division, Northwest Institute of Nuclear Technology, Xi'an 710024;

Third Division, Northwest Institute of Nuclear Technology, Xi'an 710024;

Third Division, Northwest Institute of Nuclear Technology, Xi'an 710024;

Department of Modern Physics, University of Science and Technology of China, HeFei 230026;

Department of Modern Physics, University of Science and Technology of China, HeFei 230026;

展开▼
原文格式 PDF
正文语种 chi
中图分类
关键词

Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

摘要

著录项

相关主题

期刊订阅