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>Structure and electrical characteristics of Nb-doped SrTiO3 substrates
Structure and electrical characteristics of Nb-doped SrTiO3 substrates
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The studies on structure and electrical characteristic of Nb-doped SrTiO3 (SNTO) substrates by XRD, Hall measurements, R-T and SEM, show that the SNTO substrates with the same Nb-doping concentration have different electrical properties be- cause of the nonuniformity of Nb-doping. The uni- formly doped high-quality substrates are extremely important for fabricating multilayer structure and de- vices. In addition, the experimental results also pro- vide us with SEM method to judge the uniformity of conducting material.
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机译:平成28年度论文赏受赏轮文:Effect of Si/Fe Composition, Substrate Temperature, and Substrate Orientation on the Structure and Magnetic Properties of Fe-Si Alloy Film