Center of Micro/Nano Manufacturing Technology(MNMT) Tianjin University Tianjin 300072 People’s Republic of ChinaCenter of Micro/Nano Manufacturing Technology(MNMT-Dublin) University College Dublin Ireland;
Center of Micro/Nano Manufacturing Technology(MNMT-Dublin) University College Dublin Ireland;
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian 116024 People’s Republic of China;
Department of Mechanical Engineering Northwestern University Evanston IL United States of America;
State Key Laboratory of Ultra-Precision Machining Technology Department of Industrial and Systems Engineering The Hong Kong Polytechnic University Hong Kong People’s Republic of China;
Singapore Institute of Manufacturing Technology Singapore 638075;
Department of Precision Science and Technology Graduate School of Engineering Osaka University Osaka 565-0871 Japan;
atomic and close-to-atomic scale; ACSM; manufacturing; metrology; single-atom manipulation;