Fraunhofer Institute for Manufacturing Technology and Advanced Materials (IFAM);
Wiener Straß
e 12;
Bremen;
Germany;
University of Bremen;
Faculty of Production Engineering;
Badgasteiner Straß
e 1;
Bremen;
Germany;
PECVD; Plasma; Polymerization; Coating; Homogeneity; Gas; Velocity; Computation; Fluid; Dynamics;