Experimental study was performed to simulate the cooling of LSI chip impinged by R-113 jets. The local heat transfer characteristics of a simulated heater of 5ｘ5 mm were investigated under the conditions of free-surface jet and submerged jet. The diameter of the nozzle was 534μm and the range of Reynolds number was 4900～37000. The influence of Re, the nozzle-to-target spacing and the lateral distance from the stagnation point on the heat transfer has been discussed thoroughly. The results revealed that the secondary peak of the distribution curve of the local heat transfer coefficient can occurs only in submerged jet impingement.
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