With the advancement in the technologies around the world over the past few years, the microelectromechanical systems (MEMS) have gained much attention in harvesting the energy for wireless, self-powered and MEMS devices. In the present era, many devices are available for energy harnessing such as electromagnetic, electrostatic and piezoelectric generator and these devices are designed based on its ability to capture the different form of environment energy such as solar energy, wind energy, thermal energy and convert it into the useful energy form. Out of these devices, the use of a piezoelectric generator for energy harvesting is very attractive for MEMS applications. There are various sources of harvestable energy including waste heat, solar energy, wind energy, energy in floating water and mechanical vibrations which are used by the researchers for energy harvesting purposes. This paper reviews the state-of-the-art in harvesting mechanical vibrations as an energy source by various generators (such as electromagnetic, electrostatic and piezoelectric generators). Also, the design and characteristics of piezoelectric generators, using vibrations of cantilevered bimorphs, for MEMS have also been reviewed here. Electromagnetic, electrostatic and piezoelectric generators presented in the literature are reviewed by taking into an account the power output, frequency, acceleration, dimension and application of each generator and the coupling factor of each transduction mechanism has also been discussed for all the devices.
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