This paper simulates the particle movement and field change in plasma channel during a nano-scale discharging process using PIC-MCC method and secondary emission model of electrons. Comparison between nano-scale and micro-scale discharging process was made in order to analyze the phenomenon and mechanism of nano-scale electrical discharge machining. The existence of best breakdown pressure during a gas discharging process was also verified using the simulation model.%以纳米尺度放电加工为对象,采用粒子模拟法和蒙特卡罗碰撞模型(PIC-MCC),结合二次电子发射模型,对纳米级等离子体放电通道击穿过程的粒子运动、电磁场变化等情况进行模拟仿真,对比纳米尺度与传统微细尺度放电通道击穿过程的异同,讨论纳米尺度下放电加工的新特性,并对气体电离最佳击穿气压的存在性进行了验证.
展开▼
