The laboratory needs to be equipped with not only high-level ultra-precision machining equipment,but also the precision measuring instruments accordingly.How to make correct and efficient use of the machining equipment and measuring instruments is the ability that the undergraduate students and the graduate students of ultra-precision machining technology speciality have to master.By the application of the white-light interferometer and the scanning electron microscopy in the study of ultra-precision machining mechanism,the important function of the precision measuring instruments in the ultra-precision machining laboratory is analyzed,and a concrete scheme to solve the practical problem about the small number of precision instruments and the large number of the students is proposed.%实验室不仅需要配置高水平的超精密加工装备,还需要相应的精密测量仪器.如何正确而有效地利用加工装备和测量仪器,是超精密加工技术专业本科生和研究生必须掌握的能力.利用白光干涉仪和扫描电子显微镜在超精密加工机理研究中的应用,分析精密测量仪器在超精密加工实验室中的重要作用,提出一个具体的方案解决目前精密仪器数量少而学生多的实际问题.
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