采用自行研制的低造价、小体积、可产生幅值0-35kV、重复频率1kHz的高压μs脉冲电源,设计了一套以大气压氖气为工作气体的介质阻挡放电(DBD)等离子体射流源,通过测量并计算放电过程中的电压-电流波形、拍摄放电图像、光谱分析等手段,对电压幅值、气体流速对氖气等离子体射流特性的影响进行了研究.结果表明:μs脉冲电源激励下大气压氖气DBD能产生锥状的等离子射流且其等离子强度适中；μs脉冲电源电压幅值的快速上升,可在放电空间瞬间施加高的过电压,能有效促进放电功率、电子密度、电子激发温度和射流长度的增加；工作气体流速的增加使得放电功率、电子激发温度和电子密度减小,而射流长度变化很小；一定条件下,能形成长距离的射流.%A dielectric barrier discharge (DBD) plasma jet source is presented, which is low-cost and small in size, fed with neon and driven by the a self-developed microsecond pulse power supply with a peak voltage of 0-35 kV and a frequency of 1 kHz. Influences of applied voltage amplitude and gas flow rate on the discharge characteristics of the plasma jet are studied by measuring the waveforms of voltage and current, taking the light emission images and measuring the optical emission spectra. Results show that, the DBD in neon at atmospheric pressure driven by a microsecond pulse voltage can generate a cone-shaped flaming plasma jet, and the intensity of plasma is moderate. The fast rise of the applied pulse voltage can apply a higher overvoltage instantly to the gas gap, and thus can promotes the increases of discharge power, electron density and excitation temperature efficiently; while the increase of gas flow rate results in the decrease of these parameters but little variation of the jet length. Under certain operating conditions, the plasma jet with long length can be generated.
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