将激光信号与高帧频CCD结合,解决了光学系统中振动信号和激光信号之间的转换问题,不仅能够测量振动对系统光束指向稳定性的影响,而且能够得到振动信号本身的频率特性.利用该方法对振源为150 Hz和200 Hz两种条件下的光学系统受迫振动进行测量,得到了与输入信号相吻合的振动信号属性.通过实验与分析得知:时域振幅测量精度为6.25 μm,频域分辨力为2 Hz,方法简便高效,测量结果准确,已应用于角多路准分子激光主振荡功率放大器系统打靶试验平台光束指向稳定性的研究中.%A forced vibration measurement method by laser combining the laser signal and high frequency CCD in optical systems is introduced. The method solves the conversion problem between the vibration signal and laser signal in optical systems, which can not only measure the impact of vibration on the beam stability, but also acquire the frequency characteristics of vibration signals. Forced vibration in an optical system is measured when the frequencies of vibration signals are 150 Hz and 200 Hz by using the method and the attributes of the vibration signals obtained fits those of the input signals. Test and analysis results demonstrate that the method has a time amplitude uncertainty of 6. 25 μm and frequency resolution of 2 Hz. The handy and efficient method, whose measurement is precise, has been applied to the beam pointing stability study of the multiplexing excimer MOP A laser targeting test platform accordingly.
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