A novel adjusting target mechanism of three-dimensional attitude is presented according to the characteristics of the target transport subsystem in inertial confinement fusion (ICF). The mechanism consists of a tangent mechanism adjusting rotation angle and a set of orthogonal tangent mechanism adjusting two-dimensional deflection angles. The structural parameters of the adjusting target mechanism are analyzed according to principle errors, structure errors and motion errors of following. The analysis results indicate that the system error of the adjusting target mechanism is influenced by the displacement of the linear actuators, the actuator ball radius, the working radius of the tangent mechanism, the angle error of the inclined installation hole, the centralization error of the actuators, the orthogonal error of the two tangent mechanisms, and the angle errors of the inclined target rod and inclined rotation shaft. The errors of the inclined target rod and inclined rotation shaft are the two greatest impact factors, the spherical contact error is the next. By means of precise assembly and control system compensation, the accuracy of the adjusting target mechanism can be less than 0. 1 mrad.%针对大功率激光装置中送靶机构特性,设计了一种新型三维角度调节靶架,该靶架由一个正切机构实现回转角度调整,由一套正交分布的正切机构实现二维角度偏摆调整.从靶架机构中的原理误差、结构误差和牵连误差出发,对角度调节靶架机构的结构参数进行了分析.结果显示:靶架机构误差受直线驱动器位移、驱动器球头半径、正切机构作用半径、驱动器安装孔角度误差、驱动器圆柱面对中误差、两个正切机构正交误差、靶杆和回转轴线倾斜角度影响.靶杆和回转轴安装倾斜误差影响较大,球接触误差次之,通过精密装调及控制系统补偿后此三维角度调节靶架精度可达0.1 mrad.
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