Effects of electric field fringe on performances of grid strip capacitive MEMS devices

著录项

• 来源
  《高技术通讯（英文版）》 |2011年第2期|207-213|共7页
• 作者

  Dong Linxi; Li Yongiie; Yan Haixia; Sun Lingling;

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• 作者单位

  the Key Iaboratory of RF Circuits and System of Ministry of Education Hangzhou Dianzi University Hangzhou 310018 P.R.China;

  State Key Laboratory of Transducer Technology Chinese Academy of Sciences Shanghai 200050 P.R.China;

  Toshiba Hydro-Electro Equipments Company Hangzhou 311504 P.R.China;

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• 原文格式 PDF
• 正文语种 chi
• 中图分类
• 关键词