压差传感器用于伺服系统作动器两腔压力差的测量,文中针对高可靠性、高精度、耐高温、小型化压差传感器的应用需求,提出了高可靠性压差传感器的设计方案并进行测试,主要包括芯体设计、结构设计和电路设计.该产品采用SOI硅晶圆材料制作压力敏感芯片,可在150℃下正常工作.传感器通过性能测试以及环境试验,试验结果表明该传感器能够满足实际使用要求,在150℃下温度漂移和灵敏度漂移均小于±0.1％FS/℃.%According to the measurement requirements of servo system with high accuracy,high reliability,high temperature resistance and miniaturization,a design method and test method of high reliable differential pressure sensor was introduced in this paper,mainly including the core design,structure design and circuit design.SOI Si crystal material was used for manufacturing Si pressure sensitive chip in this sensor,which can work at 150℃.Sensor passed through the performance test and evaluation of en-vironmental test,the results show that the sensor can meet the practical requirements.Under 150 ℃,temperature drift and sensi-tivity drift are less than ±0.1％ FS/℃.
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