针对静电驱动组合柔性结构的变形进行分析,考虑静电力分布载荷的基本特征、静电力与组合柔性结构变形之间的耦合作用,依据静电场理论、伪刚体理论以及非线性柔性模型,给出分析不同电压下求解组合柔性结构变形的一般方法,同时给出静电吸合电压的计算式.设计加工了MEMS组合柔性结构,采用文中方法分析静电驱动中组合柔性结构的变形,同时搭建实验测试系统,确定电压加载范围,完成组合柔性结构的变形测试.将实验测试结果与理论计算结果进行对比分析,验证文中分析方法的正确性.%According to combined compliant structures driven by electrostatic force,considering the distributed load of the electrostatic force and the coupling between the electrostatic force and the deformation,based on the theory of electrostatic field theory,the pseudo rigid body and flexible nonlinear model,the deformation analysis method under different driven voltage and the calculation formula about the pull-in voltage were given.The calculation formula of static electricity and the voltage were given at the same time.The MEMS flexible combination structure was designed.Deformation of combined compliant structures driven by electrostatic force was analyzed by the method in this paper.The test system was built and the driven voltage range was determined,the deformation of the combined compliant structure under different driven voltage were tested.By contrasting the theoretical and the test results,the correctness of the analysis method is proved.
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