Er-doped ZnO nanoparticles were synthesized by chemical precipitation method,and characterized by XRD,TEM and PL. The results showed that the Er ions were successfully doped into the ZnO host,and the samples were composed of uniform nanoparticles. The doped nanoparticles with smaller size had more defects in ZnO,which indicated that the defects in ZnO were modulated and the crystal quality of the doped ZnO became bad by Er ions doping.%采用化学沉淀法合成了稀土Er掺杂ZnO纳米颗粒，利用XRD、TEM和PL对合成的样品进行了表征与分析。研究结果表明，稀土Er成功掺杂到ZnO晶格中，合成样品为尺寸均一的纳米颗粒。掺杂Er后样品的尺寸略有减小，而样品中的缺陷明显增多，这说明稀土Er的掺杂对ZnO内部的缺陷进行了调整，缺陷的整体增强同时也说明样品的结晶质量下降。
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