研究了金属-介质-金属结构在可见光波段的反射滤光特性.该结构由柔性透明基底、金属层、介质-金属纳米光栅结构组成.利用严格耦合波分析法(RCWA)模拟了TM偏振光入射时,亚波长介质-金属光栅的占宽比、周期和厚度等结构参数对反射光谱特性的影响.理论模拟结果表明:光栅的结构参数变化可改变反射波段,进而调节滤光颜色.在此基础上,进一步优化结构参数,得到了基于减色法的彩色滤光片结构,获得了青色、品红色和黄色三原色.该结构的主要优点是,当入射角在0～45°范围内变化时,反射光谱谷值位置和反射带宽基本不变.本文所提出的结构特别适合用于反射式彩色显示.%Reflection filtering characteristics of metal-dielectric-metal (MDM) structure at visible region are investigated theoretically. The structure consists of 3 parts; the flexible transparent substrate, the metal layer and the dielectric-metal grating layer. By using rigorous couple-wave analysis (RCWA), the reflection characteristics of transverse magnetic (TM) polarized light are analyzed as a function of the duty cycle, the period and the thickness of the dielectric-metal grating. It is found that different colors can be obtained by adjusting the parameters of the structure. Based on the simulation results and the cyan-magenta-yellow (CMY) color scheme, a high-performance color filter is proposed by optimizing the structural parameters and the 3 prime colors including cyan, magenta and yellow are obtained. The reflection valley and the bandwidths remain almost unchanged over a wide incident angle range of 0~45°. The proposed color filter is suitable for filtering used in reflective-type color displays.
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