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自准直仪光学系统设计

         

摘要

An novel high-precision intellectualized electronic digital display autocollimator for two-dimensional photometry was designed ,which could be used to measure small angles .The wavelength of the system was 670 nm .The foldback system was adopted in order to reach 1 m focal length and reduce the volume of the system .The position sensitive detector (PSD) was used as the optical receiver so that the accuracy of the instrument was increased and could meet the requirements that the measurement range was ± 6′and the accuracy was 0 .1″.The optical path system of the autocollimator was designed and optimized by Zemax .The emergent rays were parallel and the rays received by the determinand were homogeneous as shown in footprint diagram .These results can meet the needs of practical manufacture well .%设计一种能同时进行两维测量的、智能化的数显式自准直仪,该光学仪器可用来进行小角度测量。系统设计波长为670 nm ,为了达到1 m的焦距,同时也缩小系统的体积,自准直仪采用折返式结构。系统中使用位置敏感探测器(PSD )作为接收器,仪器的指标满足设计要求:测量范围为±6′,精度为0.1″。通过Zemax仿真对自准直仪主光路进行设计及优化,出射为平行光束,由足迹图观测被测面接收到的光分布均匀,能够满足实际生产中的需要。

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