Optimal Integrated Schedule of Entire Process of Dual-blade Multi-cluster Tools From Start-up to Close-down

Qinghua Zhu; Yan Qiao; Naiqi Wu

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Optimal Integrated Schedule of Entire Process of Dual-blade Multi-cluster Tools From Start-up to Close-down

机译：从启动到关闭的双刀片多集群工具整个过程的最佳集成时间表

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Multi-cluster tools are widely used in majority of wafer fabrication processes in semiconductor industry.Smaller lot production,thinner circuit width in wafers,larger wafer size,and maintenance have resulted in a large quantity of their start-up and close-down transient periods.Yet,most of existing efforts have been concentrated on scheduling their steady states.Different from such efforts,this work schedules their transient and steady-state periods subject to wafer residency constraints.It gives the schedulability conditions for the steady-state scheduling of dual-blade robotic multi-cluster tools and a corresponding algorithm for finding an optimal schedule.Based on the robot synchronization conditions,a linear program is proposed to figure out an optimal schedule for a start-up period,which ensures a tool to enter the desired optimal steady state.Another linear program is proposed to find an optimal schedule for a closedown period that evolves from the steady state period.Finally,industrial cases are presented to illustrate how the provided method outperforms the existing approach in terms of system throughput improvement.

机译：多集群工具广泛用于半导体行业的大多数晶片制造工艺中。小批量生产，晶片中的电路宽度更薄，晶片尺寸更大以及维护，导致了它们大量的启动和关闭瞬态周期。但是，现有的大多数工作都集中在调度其稳态上。与此类工作不同的是，该工作在受到晶圆驻留限制的情况下调度其瞬态和稳态周期。这为双稳态调度提供了可调度性条件。刀片机器人多集群工具和找到最佳计划的相应算法。基于机器人的同步条件，提出了一个线性程序来确定启动期间的最佳计划，以确保工具能够进入所需的计划。提出了另一个线性程序，以找到从稳态周期演变而来的停机周期的最佳计划。最后，在提出了一些案例，以说明所提供的方法在系统吞吐量提高方面如何胜过现有方法。

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《自动化学报（英文版）》 |2019年第2期|553-565|共13页
作者
Qinghua Zhu; Yan Qiao; Naiqi Wu;
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作者单位

School of Computer Science and Technology, Guangdong University of Technology, Guangzhou 510006, China;

Helen and John C.Hartmann Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark NJ 07102, USA;

Institute of Systems Engineering, Macau University of Science and Technology, Taipa, Macau, China;

Institute of Systems Engineering, Macau University of Science and Technology, Taipa, Macau, China;

National Key Laboratory of Precise Electronic Manufacturing Technology and Equipment,Guangdong University of Technology, Guangzhou 510006, China;

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Optimal Integrated Schedule of Entire Process of Dual-blade Multi-cluster Tools From Start-up to Close-down

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