研究并建立了长脉冲空心激光与硅材料相互作用产生应力场的数学物理模型，采用基于有限元法的多物理场仿真软件Comsol对模型进行了数值求解，得到了硅材料表面应力场的空间与时间分布曲线，分析总结了长脉冲空心激光辐照下硅材料表面应力场的变化特征与规律。实验结果可为深入揭示空心激光与硅材料相互作用机理奠定一定理论基础，也可为激光加工及激光损伤研究提供一定理论参考。%In this paper, a mathematical physical model of hollow long pulse laser interacting with silicon material to generate stress field is studied and established. Obtain the spatial and temporal distribution curves of stress field on sili-con surface by adopting multi-physics simulation software of Comsol based on finite element method carrying out the numerical solution of model. Besides,the changed characteristics and rules of silicon material surface stress field irradiat-ed by hollow long pulse laser are analyzed and summarized. The results of this paper can provide a theoretical basis for the further study of the interaction mechanism between the hollow laser and silicon and supply a theoretical reference for the research of laser processing and laser damage.
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