随着微电子产业和纳米加工技术的发展，对测量精度的要求越来越高，大多数精密平台选用了精度高的光栅作为位移测量系统。由于光栅属增量式测量，自身没有零位，为了提高测量精度，必须对它进行误差修正，弥补增量式光栅测量系统缺少绝对零位所引起的掉电时数据丢失的缺点，要求其具有固定零位。应用Matlab软件，通过计算机随机数生成器对产生的随机数列设置阈值，根据经验结论设置判断条件，计算出适用于实际工程应用的零位光栅编码方案，并对所设计的方案进行模拟仿真，得出符合条件的零位脉冲波形，用于光栅上零位的刻划，提高了零位的定位精度，保证了位移测量系统在掉电或重新开机时光栅尺的测量精度。%With the development of the microelectronics industry and nano fabrication technology,the measurement accu-racy is demanded more increasingly. The precise grating is selected as the displacement measurement system in most sophisticated platforms. Since the grating belongs to incremental measurement without zero grating, in order to improve the accuracy of measurement,and to settle the problem that the data is lost when power down,zero-reference grating must be set to correct the error. In this paper,Matlab software is used to get the coding scheme to meet the require-ments of practical application,the thresholds is set to the random sequence computer generating and determine conditions based on experience is set. The grating zero coding scheme suitable for the actual engineering applications is calculated and simulated;the zero pulse waveform for the conditions is acquired for the zero score in grating;and zero positioning accuracy is improved;and the measuring precision of grating ruler in displacement measurement system in the power down or restart time is ensured.
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