首页> 中文期刊> 《长春理工大学学报(自然科学版)》 >EPA静电电位的测量不确定度评定

EPA静电电位的测量不确定度评定

         

摘要

Electrostatic potential of electrostatic discharge protected area (EPA) is an important indicator for anti-static work area.Adopting the electrostatic voltage tester EFM-022 to measure the electrostatic potential of EPA,the paper proposed common method of uncertainty evaluation of electrostatic potential's measurement.Firstly,analyzed the measurement principle of the electrostatic potential,and established the deriving mathematical model of measurement results,determined the source of two types measurement uncertainty; secondly,evaluated measurement uncertainty of electrostatic potential; Finally,derived common uncertainty formula to ensure the measurement accuracy of the EPA's electrostatic potential from uncertainty theoretically.%防静电工作区(EPA)的静电电位是评价防静电工作区防静电能力的重要指标,在采用静电电压测试仪EFM-022测量EPA静电电位的前提下,提出了EPA静电电位测量不确定度评定的通用方法.对静电电位的测量原理进行了分析,建立了测量结果的导出数学模型,并确定了两类测量不确定度来源;进行了EPA静电电位的测量不确定度评定;最终,在EPA静电电位测量值的范围较宽的情况下,推导出了通用的不确定度计算公式,从理论上保证了EPA静电电位测量的准确性.

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