The purpose of this paper is to introduction a method to improving the accuracy of PSD device. This system takes the master-control unit with ARM9, takes AD7674 as the high-speed ADC, from the hardware to meet the precision requirement of the PSD device. At the same time running the Linux OS on the ARM9 embedded system .The Linux OS using the improved BP processing the data to correct the non-linearity of PSD. The whole system improved the precision of PSD.%介绍一种提高PSD测量精度的方法,通过在ARM9平台上搭栽高精度的AD芯片,从硬件方面满足PSD器件对精度的要求；同时在ARM9平台上运行Linux操作系统,并将取得的数据使用一种改进型的逆误差传播算法(BP算法)进行误差处理,对其非线性区域进行补偿,从而提高了PSD器件的整体精度.
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