钛酸系铁电薄膜是铁电薄膜中最重要的一类，其制备技术繁多．虽然很多文献对各种制备技术的优缺点有所论述，对于其适用性则未有全面的分析．本文结合钛酸系铁电薄膜的化学成分特点，对主要的铁电薄膜制备技术进行分类，通过比较分析各种技术的特点，讨论这些技术在实验室基础研究、商业化生产、军工或高附加值产品制备这三方面的适用性，可为铁电薄膜制备技术研究人员在技术选用、方向把握方面提供参考．%Of all the present ferroelectric thin films, titanate is the most important kind. Many deposition technologies have been successfully developed. Although the advantages and disadvantages of these technologies were widely commented in many articles,the com
展开▼
