Dept. of Electrical Engineering;
Harbin Institute of Technology;
Harbin 150001;
China;
Dept. of Electrical Engineering;
Harbin Institute of Technology;
Harbin 150001;
Chinan electrostatic micromotor is compared with a conventional electromagnetic mieromotor;
and the scaling effect of driving forces is analysed according to their different operation principles. Characteristic dimension L represents the linear scale of micromotors. Electromagnetic driving force is proportional to high-order power of characteristic dimension L whereas electrostatic driving force is not. So;
in micro domain;
the effect of electrostatic force is larger than that of electromagnetic force;
which makes electrostatic micromotor more competitive against electromagnetic alternative in MEMS. In assessing the performance of a micromotor;
the power per unit volume and efficiency are the two most important criteria. Hence;
the two kinds of micromotors are further compared from these two aspects. The results indicate that electrostatic a micromotor has higher power per unit volume and efficiency;
moreover;
its structure is simple;
it can be made sufficiently small. For those advantages of electrostatic micromotors;
they can be used in optical devices;
aerospace equipment and medical instruments.;
微机电系统; MEMS; 特征尺度; 微领域; 规模效应; 微发电机;
