采用硝酸盐为前驱盐制备涂层导体结构中的La2Zr2O7(LZO)过渡层.实验通过对前驱盐粉体热分解行为的分析,以及前驱盐溶液在铝酸镧(LAO)单晶和Ni5W合金基底上外延生长LZO膜层工艺的比较研究,经优化获得了采用硝酸盐为前驱盐,适用于Ni5W合金基底的低温两步热处理结合高温快速热处理制备LZO的工艺路线.研究发现,硝酸盐热分解过程及中间产物分解对外延织构的生成起着重要的作用.取向分析显示LZO膜层(222)phi扫描和(400)ωd扫描的半高宽分别为8.5°和8.1°,这表明LZO膜层形成了较好的立方织构.SEM分析显示该工艺制备的膜层均匀致密,没有裂纹和孔洞.以上研究表明硝酸盐法可以应用于LZO过渡层的制备.%La2Zr2O7(LZO) buffer layer was prepared on the cube textured nickel alloy substrate with the nitrate as the precursor salts. Combine with the analysis of the thermal pyrolysis property of the precursor salts, and the study of epitaxial growth of LZO films on both of the LAO single crystal and the Ni5W alloy substrate, a optimized processing route is achieved, which is two step heating ways at low temperature together with the ramp heat treatment at high temperature. It is concluded that the pyrolysis process plays the most important role in the texture epitaxy. The orientation analyses reveal the formation of a cube texture, with the FWHM of (222) phi scan and the (400) ω scan of 8.5°and 8.1°, respectively. The SEM image shows the dense and homogeneous film without cracks and holes. The discussions above indicate that the nitrate route is feasible for the preparation of the LZO buffer layer.
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