We used lumped parameter method to establish the mathematical model of the working process of microjet acturator. The governing equations are eqs.(1a) through (1e); they involve many parameters: (1) displacement and velocity of metallicm embrane of actuator, (2) density and pressure of airflow, (3) air velocity at ex it. Eqs.(1a) through (1e) are strongly coupled ordinary differential equations. Calculated results for a numerical example in section 2 show that, after a short transient period of only about five cycles, the variations of various parameters in the microjet actuator approach values that become synchronized with the driving force of the actuator.rn For the same numerical example, we calculated the variations of airvelocity at exit with vibration frequency (Fig.3a) and diameter of the circular exit (Fig.3b ) respectively. Figs.3 (a) and 3(b), in our opinion, show that optimal combination of vibration frequency and exit diameter exists to give maximum energy transfer efficiency, which, we deem, can be represented by air velocity at exit.%使用集总参数法，建立了描述微射流作动器工作过程的数学模型。计算结果显示， 对于给定的驱动模式，作动器各工作参数基本上随驱动频率同步发展。另外存在着最佳的驱 动电压频率和开口大小，使得作动器的能量转换效率最高。
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