RF characterization of InP double heterojunction bipolar transistors on a flexible substrate under bending conditions

Lishu Wu; Jiayun Dai; Yuechan Kong; Tangsheng Chen; Tong Zhang

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RF characterization of InP double heterojunction bipolar transistors on a flexible substrate under bending conditions

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This letter presents the fabrication of InP double heterojunction bipolar transistors(DHBTs)on a 3-inch flexible substrate with various thickness values of the benzocyclobutene(BCB)adhesive bonding layer,the corresponding thermal resistance of the InP DHBT on flexible substrate is also measured and calculated.InP DHBT on a flexible substrate with 100 nm BCB obtains cut-off frequency f_(T)=358 GHz and maximum oscillation frequency f_(MAX)=530 GHz.Moreover,the frequency performance of the InP DHBT on flexible substrates at different bending radii are compared.It is shown that the bending strain has little effect on the frequency characteristics(less than 8.5%),and these bending tests prove that InP DHBT has feasible flexibility.

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来源
《半导体学报》 |2022年第9期|64-67|共4页
作者
Lishu Wu; Jiayun Dai; Yuechan Kong; Tangsheng Chen; Tong Zhang;
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作者单位

Joint International Research Laboratory of Information Display and Visualization of Electronic Science and Engineering University 210096;

Science and Technology on Monolithic Integrated Circuits and Modules Laboratory Electronic Devices Institute 210016;

Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Education of Instrument Science and Engineering University 210096;

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原文格式 PDF
正文语种 chi
中图分类半导体技术;
关键词
InP DHBT; thermal resistance; radio frequency; bending;

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1. High Power SiGe X-Band (8～10GHz) Heterojunction Bipolar Transistors and Amplifiers [J] . Ma Zhenqiang ,Wang Guogong ,Jiang Ningyue . 半导体学报：英文版 . 2006,第2期
2. A Direct Parameter-Extraction Method for GaInP/GaAs Heterojunction Bipolar Transistors Small-Signal Model [J] . SHIXin-zhi ,LIUHai-wen ,SUNXiao-wei . 武汉大学自然科学学报：英文版 . 2005,第2期

RF characterization of InP double heterojunction bipolar transistors on a flexible substrate under bending conditions

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