为实现国家仪器专项中相移干涉仪的工程化及产业化,结合可重构制造系统设计的思想,研究了不同口径及不同测量需求的系列干涉主机的光学系统共性问题,提出了相移干涉仪内部光路模块化设计的理念.以平面度计量用干涉仪为例阐述了模块化后的设计与制造的快速响应过程.结果表明:以立方棱镜为耦合中心的各个模块,均具有规范的接口以保证模块间的良好衔接;有多种可更换光学模组以保证新型干涉仪的客户订制快速响应.%Focusing on the demand of engineering and industrialization in the national special instruments,in combination with the idea of reconfigurable manufacturing system,the common problems of the optical systems with different aperture and measurement demand are studied and the idea of modular design is proposed in the phase shifting interferometry.The process of modular design and rapid response are described with the example of flatness mearsument interferomter.The results show that normative interfaces are designed in order to ensure the cohesion of each module centered on the cubic prism.A variety of replaceable optical modules is available to ensure the fast response of the new type of interferometer.
展开▼
